Title :
7-μm-cutoff PtSi infrared detector for high sensitivity MWIR applications
Author :
Lin, T.L. ; Park, J.S. ; Gunapala, S.D. ; Jones, E.W. ; Del Castillo, H.M. ; Weeks, M.M. ; Pellegrini, P.W.
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fDate :
3/1/1995 12:00:00 AM
Abstract :
PtSi Schottky infrared detectors with extended cutoff wavelengths of 5.7, 6.6, and 7.3 μm have been demonstrated by incorporating a thin p+ layer at the PtSi-Si interface for high sensitivity medium wavelength infrared imaging applications. The response uniformity of the 7-μm cutoff detector was studied.
Keywords :
Schottky barriers; image sensors; infrared detectors; infrared imaging; platinum compounds; semiconductor-metal boundaries; sensitivity; 5.7 to 7.3 micron; PtSi infrared detector; PtSi-Si; Schottky IR detectors; extended cutoff wavelengths; high sensitivity MWIR applications; medium wavelength infrared imaging; response uniformity; thin p+ layer; Calibration; Dark current; Doping; Fabrication; Infrared detectors; Infrared imaging; Laboratories; Optical imaging; Space technology; Thermionic emission;
Journal_Title :
Electron Device Letters, IEEE
