Title :
High spatial resolution diagnostics of optical waveguides using a photon-scanning tunneling microscope
Author :
Toda, Y. ; Ohtsu, M.
Author_Institution :
Interdisciplinary Grad. Sch. of Sci. and Eng., Tokyo Inst. of Technol., Japan
Abstract :
We propose a high-resolution diagnostics technique for optical waveguides using a photon-scanning tunneling microscope (P-STM). This technique has the advantageous capabilities of nondestructive measurement and informative analysis of guided mode. The capability of this technique was evaluated by measuring the characteristics of an LiTaO3 waveguide. Scattered light spot of 500-nm diameter caused by defects was measured, and a normalized width was estimated to be 3.7 μm. Moreover, we obtained the power dispersion in Y-branch waveguides, which were in good agreement with the theoretical plots calculated by the beam propagation method (BPM).
Keywords :
light scattering; lithium compounds; optical dispersion; optical microscopy; optical resolving power; optical testing; optical waveguides; scanning tunnelling microscopy; 500 nm; 633 nm; 680 nm; LiTaO/sub 3/; LiTaO/sub 3/ waveguide; Y-branch waveguides; beam propagation method; defects; guided mode; high spatial resolution; high-resolution diagnostics technique; informative analysis; nondestructive measurement; normalized width; optical waveguides; photon-scanning tunneling microscope; power dispersion; scattered light spot; Light scattering; Optical microscopy; Optical propagation; Optical scattering; Optical waveguide theory; Optical waveguides; Particle scattering; Spatial resolution; Tunneling; Waveguide theory;
Journal_Title :
Photonics Technology Letters, IEEE
