Title :
Wavelength control of vertical cavity surface-emitting lasers by using nonplanar MOCVD
Author :
Koyama, F. ; Mukaihara, T. ; Hayashi, Y. ; Ohnoki, N. ; Hatori, N. ; Iga, Kenichi
Author_Institution :
P&I Lab., Tokyo Inst. of Technol., Japan
Abstract :
We present a novel approach of on-wafer wavelength control for vertical cavity surface-emitting lasers (VCSELs) using nonplanar metalorganic chemical vapor deposition. The resonant wavelength of 980 nm VCSELs grown on a patterned substrate can be controlled in the wavelength range over 45 nm by changing the size of circular patterns. A multi-wavelength VCSEL linear array was fabricated by using this technique. The proposed method will be useful for multi-wavelength VCSEL arrays as well as for the cancellation of wavelength nonuniformity over a wafer.<>
Keywords :
chemical vapour deposition; laser cavity resonators; optical fabrication; semiconductor growth; semiconductor laser arrays; semiconductor lasers; surface emitting lasers; 980 nm; circular patterns; multi-wavelength VCSEL linear array; nonplanar MOCVD; nonplanar metalorganic chemical vapor deposition; on-wafer wavelength control; patterned substrate; resonant wavelength; vertical cavity surface-emitting lasers; wavelength control; wavelength nonuniformity; wavelength range; Chemical lasers; Laser tuning; MOCVD; Optical arrays; Optical control; Optical surface waves; Substrates; Surface emitting lasers; Surface waves; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
