Abstract :
A University of Washington researcher is using common food dyes to improve photolithography, the dominant semiconductor microfabrication technology. The microfluidic masks are made by filling transparent silicone channels with red dye, which blocks UV light, to create the desired patterns to be projected onto the photoresist.
Keywords :
dyes; photoresists; semiconductor device manufacture; ultraviolet lithography; UV light; University of Washington; food dyes; microfluidic masks; photolithography; photoresist; red dye; semiconductor microfabrication technology; transparent silicone channels; Circuit testing; Costs; Embedded computing; Filling; Lithography; Microelectromechanical systems; Microfluidics; Prototypes; Resists; Semiconductor materials;
