• DocumentCode
    1243362
  • Title

    Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

  • Author

    Aarnio, J. ; Heimala, P. ; Giudice, M. Del ; Bruno, F.

  • Author_Institution
    VTT, Tech. Res. Centre of Finland, Espoo, Finland
  • Volume
    27
  • Issue
    25
  • fYear
    1991
  • Firstpage
    2317
  • Lastpage
    2318
  • Abstract
    The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 mu m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.
  • Keywords
    birefringence; integrated optics; optical waveguides; silicon compounds; 1.54 micron; Si 3N 4 layer thickness; SiON optical waveguides; SiON-Si 3N 4-SiO 2; birefringence control; birefringent planar optical waveguides; characterisation; design; dispersion characteristics; fabrication; form birefringence; wavelength;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19911435
  • Filename
    121324
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1243362