• DocumentCode
    1243604
  • Title

    Magnetically suspended MEMS spinning wheel gyro

  • Author

    Dauwalter, Charles R. ; Ha, Joung C.

  • Author_Institution
    MilliSensor Syst. & Actuators, Inc, West Newton, MA
  • Volume
    20
  • Issue
    2
  • fYear
    2005
  • Firstpage
    21
  • Lastpage
    26
  • Abstract
    A concept of a magnetically suspended spinning wheel gyro is described. The gyro is based on a patented, planar magnetic actuator and position sensor configuration with a gyro wheel that is rotated by a multi-phase electromagnetic spin motor. The motor and actuator/sensor configurations, in addition to providing the necessary forces to suspend the spinning wheel, are amenable to fabrication using some of the developing MEMS fabrication technologies, making batch fabrication of the gyro possible. This provide the capability for high production yield in high volume through the use of batch processing, without the need for skilled hand labor, resulting in high yields, high reliability, and low cost of ownership. The gyro concept is described in detail. The high-speed rotation of the wheel, somewhat smaller than a dime, can produce an angular momentum much larger than that of the Coriolis force based MEMS gyros now receiving intensive development, and is expected to provide considerably higher performance than currently available from this class of instrument. Two axes of angular rate information and three axes of acceleration information are provided by the control loops that center the wheel within the case. Thus, two such magnetically suspended spinning wheel gyros can be used to implement a complete IMU, and can also provide redundancy in three of the five degrees of freedom
  • Keywords
    batch processing (industrial); electromagnetic actuators; gyroscopes; micromechanical devices; Coriolis force based MEMS gyros; MEMS fabrication; acceleration information; angular rate information; batch fabrication; batch processing; control loops; magnetically suspended MEMS; magnetically suspended spinning wheel gyro; multi-phase electromagnetic spin motor; planar magnetic actuator; position sensor configuration; Actuators; Electromagnetic forces; Fabrication; Magnetic levitation; Magnetic sensors; Micromechanical devices; Planar motors; Production; Spinning; Wheels;
  • fLanguage
    English
  • Journal_Title
    Aerospace and Electronic Systems Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    0885-8985
  • Type

    jour

  • DOI
    10.1109/MAES.2005.1397145
  • Filename
    1397145