DocumentCode :
1244188
Title :
The development of a MEMS gyroscope for absolute angle measurement
Author :
Piyabongkarn, Damrongrit ; Rajamani, Rajesh ; Greminger, Michael
Author_Institution :
Dept. of Mech. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Volume :
13
Issue :
2
fYear :
2005
fDate :
3/1/2005 12:00:00 AM
Firstpage :
185
Lastpage :
195
Abstract :
Microelectromechanical systems (MEMS) gyroscopes are typically designed to measure angular rate of rotation. A measurement of the angle itself is useful in many applications but cannot be obtained by integrating the angular rate due to the presence of bias errors which cause a drift. This paper presents an innovative design for a vibrating gyroscope that can directly measure both angle and angular rate. The design is based on the principle of measuring the angle of free vibration of a suspended mass with respect to the casing of the gyroscope. Several critical challenges have to be handled before the theoretical sensing concept can be converted into a reliable practical sensor. These include compensating for the presence of dissipative forces, mismatched springs, cross-axis stiffness and transmission of rotary torque. These challenges are addressed by the development of a composite nonlinear feedback control system that compensates for each of the above effects and ensures that the mass continues to behave as a freely vibrating structure. Theoretical analysis and simulation results presented in the paper show that the gyroscope can accurately measure both angle and angular rate for low-bandwidth applications.
Keywords :
angular measurement; feedback; gyroscopes; micromechanical devices; nonlinear control systems; MEMS gyroscope; absolute angle measurement; composite nonlinear feedback control system; cross-axis stiffness; dissipative forces; microelectromechanical systems; mismatched springs; rotation angular rate measurement; vibrating gyroscope; Feedback control; Goniometers; Gyroscopes; Microelectromechanical systems; Micromechanical devices; Reliability theory; Rotation measurement; Springs; Torque; Vibration measurement; Angle measurement; angular rate; gyroscope; microelectromechanical systems (MEMS);
fLanguage :
English
Journal_Title :
Control Systems Technology, IEEE Transactions on
Publisher :
ieee
ISSN :
1063-6536
Type :
jour
DOI :
10.1109/TCST.2004.839568
Filename :
1397754
Link To Document :
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