Simulating micro-electromechanical systems

Author

Pelz, Georg ; Bielefeld, J. ; Zimmer, G.

Author_Institution

Dept. of Electron Devices & Circuits, Duisburg Univ.

Volume

11

Issue

2

fYear

1995

fDate

3/1/1995 12:00:00 AM

Firstpage

10

Lastpage

13

Abstract

Modelling micro-electromechanical devices with a system of algebraic and nonlinear (partial) differential equations, as opposed to ordinary differential equations, simplifies the simulation process and eliminates simulator coupling problems. In this article, we automate the modeling of mechanical parts with electronic devices using MeXeL, which translates the system of equations to Spice3-netlists. In this way, difficulties caused by coupling different simulators are eliminated. Here, we show the suitability of such a method by dynamically simulating a deformable mirror device (DMD) and its controlling circuit

Keywords

SPICE; digital simulation; finite difference methods; micromechanical devices; nonlinear differential equations; partial differential equations; semiconductor device models; MeXeL; Spice3-netlists; deformable mirror device; micro-electromechanical systems; nonlinear partial differential equations; simulation process; Circuit simulation; Deformable models; Differential equations; Electrodes; Finite difference methods; Microelectromechanical systems; Mirrors; Nonlinear equations; Partial differential equations; Voltage;

fLanguage

English

Journal_Title

Circuits and Devices Magazine, IEEE

Publisher

ieee

ISSN

8755-3996

Type

jour

DOI

10.1109/101.366116

Filename

366116