Yield analysis of optical MEMS assembly Process using a Monte Carlo Simulation technique

Author

Badreldin, Tarek ; Saad, Tamer ; Khalil, Diaa

Author_Institution

MEMSCAP, Cairo, Egypt

Volume

23

Issue

2

fYear

2005

Firstpage

510

Lastpage

516

Abstract

We developed a statistical Monte Carlo technique for the performance estimation of optical microelectromechanical systems (MEMS) components taking into account the randomness nature of its assembly. The developed technique is applied on the 2×2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive-alignment conditions. The obtained results enable us to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This enables us to establish a design for manufacturability technique for the optical MEMS components.

Keywords

Monte Carlo methods; microassembling; micromirrors; microswitches; optical design techniques; optical switches; Monte Carlo simulation; assembly process; design-for-manufacturability; fabrication parameters; microelectromechanical systems; moving mirror; optical MEMS; optical MEMS components; optical MEMS switch; performance estimation; performance sensitivity; randomness; realistic passive-alignment; statistical Monte Carlo technique; yield analysis; Assembly systems; Microelectromechanical systems; Micromechanical devices; Microswitches; Mirrors; Monte Carlo methods; Optical device fabrication; Optical devices; Optical sensors; Performance analysis; 2; Monte Carlo simulation; design for manufacturability; optical microelectromechanical systems (MEMS); process capability;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2004.842301

Filename

1402527