Title :
An automated electro-optic probing system for ultra-high-speed IC´s
Author :
Shinagawa, Mitsuru ; Nagatsuma, Tadao
Author_Institution :
NTT LSI Labs., Kanagawa, Japan
fDate :
12/1/1994 12:00:00 AM
Abstract :
This paper describes an automated optical probing system based on external electro-optic sampling for the internal diagnoses of ultra-high-speed IC´s. A workstation-controlled environment, automatic probe positioner, and module-based system architecture make the system easy to use, and improve measurement accuracy and reproducibility. Voltage sensitivity is routinely obtained on an order of 1 mV/√(Hz) at frequencies up to 70 GHz. The system has been successfully applied to the internal-node measurement of on-wafer digital IC´s operating at 20 Gb/s
Keywords :
automatic test equipment; electro-optical devices; fault diagnosis; fault location; integrated circuit measurement; integrated circuit testing; very high speed integrated circuits; 20 Gbit/s; 70 GHz; automated electro-optic probing; automatic probe positioner; electro-optic sampling; internal diagnoses; internal-node measurement; measurement accuracy; module; on-wafer digital IC; reproducibility; ultra-high-speed IC; voltage sensitivity; workstation-controlled environment; Circuit testing; Control systems; Earth Observing System; High speed optical techniques; Laser beams; Optical beams; Optical modulation; Optical sensors; Probes; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
