Title :
A survey contactless measurement and testing techniques
Author :
Sayil, Selahattin ; Kerns, David V. ; Kerns, Sherra E.
Abstract :
Electron-beam testing technique includes photoemissive probing; electrooptic sampling; charge density probing and photoexcitation are analyzed. Among these techniques an ideal contactless probing system is simple, inexpensive to operate and compatible with the existing test equipment. It will not perturb the circuit and would measure electric signals with minimum crosstalk. Experimental results demonstrate that multiple optical test vectors can be input on the periphery of a DUT (device under test) with negligible crosstalk using this technique. The bandwidth of the test system would be compatible with picosecond data pulses and it would not be limited to certain materials. The approach offers increased testability and measurement of the "chip under test".
Keywords :
electro-optical devices; electron beam testing; integrated circuit measurement; integrated circuit testing; optical crosstalk; optical testing; particle beam diagnostics; photoemission; photoexcitation; scanning electron microscopes; signal sampling; test equipment; charge density probing; contactless measurement; device under test; electric signal measurement; electron-beam testing technique; electrooptic sampling; minimum crosstalk; multiple optical test vector; photoemissive probing; photoexcitation; picosecond data pulse; Bandwidth; Circuit testing; Electric variables measurement; Materials testing; Optical crosstalk; Optical devices; Optical pulses; Sampling methods; System testing; Test equipment;
Journal_Title :
Potentials, IEEE
DOI :
10.1109/MP.2005.1405798