Title :
Comparison of RSG-MOSFET and capacitive MEMS resonator detection
Author :
Abele, N. ; Pott, Vincent ; Boucart, K. ; Casset, F. ; Segueni, K. ; Ancey, P. ; Ionescu, A.M.
Author_Institution :
Ecole Polytechnique Fed. de Lausanne EPFL, Electron. Labs., Lausanne, Switzerland
fDate :
3/3/2005 12:00:00 AM
Abstract :
A simulation comparison of MOSFET and double-metal-plate capacitive techniques for vibration detection of MEMS resonator and sensor applications is reported. A novel resonant suspended-gate MOSFET (RSG-MOSFET) analytical model is developed and used for simulating the mechanical and electrical behaviour of the resonant device under electrostatic actuation. It is demonstrated that a MOS-based detection offers signal amplification advantages over conventional capacitive detection especially for narrow beam resonators.
Keywords :
MOSFET; capacitive sensors; electrostatic actuators; micromechanical resonators; microsensors; vibration measurement; MEMS resonators; MEMS sensors; RSG-MOSFET vibration detection; capacitive vibration detection; double-metal-plate capacitive techniques; electrostatic actuation; narrow beam resonators; resonant suspended-gate MOSFET; signal amplification;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20047409
