Fabrication and coupling-to-fibre characteristics of laser diodes integrated with a spot-size converter having a lateral taper

Author

Wada, M. ; Okamoto, H. ; Kohtoku, M. ; Kawano, K. ; Kadota, Y. ; Kondo, Y. ; Kishi, K. ; Kondo, S. ; Sakai, Y. ; Kotaka, I. ; Noguchi, Y. ; Itaya, Y.

Author_Institution

NTT Opto-Electron. Labs., Kanagawa, Japan

Volume

144

Issue

2

fYear

1997

fDate

4/1/1997 12:00:00 AM

Firstpage

104

Lastpage

108

Abstract

Laser diodes monolithically integrated with spot-size converters operating at 1.3 μm, and having an almost circular narrow emitted beam, have been successfully fabricated using 2 inch (50.8 mm) full wafer fabrication technology. The spot-size converters consist of a lateral taper, thin-film guiding layer and ridge structure. The epitaxial structure is designed to have wide fabrication tolerance with no deterioration of device characteristics. The investigation of the coupling-loss dependence on the dimension parameters in the spot-size converters confirms that this device has a wide fabrication tolerance for these parameters. Furthermore, butt-coupling loss to fibre as low as -1.3 dB is attained with alignment tolerance wide enough for passive alignment. The overall device is as short as 450 μm, enabling high availability from one wafer

Keywords

integrated circuit technology; integrated optoelectronics; laser transitions; optical couplers; optical fabrication; optical fibre couplers; optical films; optical losses; semiconductor lasers; semiconductor technology; alignment tolerance; butt-coupling loss; circular narrow emitted beam; coupling-loss dependence; coupling-to-fibre characteristics; device characteristics; dimension parameters; epitaxial structure; full wafer fabrication technology; laser diodes; lateral taper; monolithically integrated; passive alignment; ridge structure; spot-size converter; spot-size converters; thin-film guiding layer; wide fabrication tolerance;

fLanguage

English

Journal_Title

Optoelectronics, IEE Proceedings -

Publisher

iet

ISSN

1350-2433

Type

jour

DOI

10.1049/ip-opt:19971019

Filename

590334