Microlens fabricated by the planar process

Author

Shimada, Jun-ichi ; Ohguchi, Osamu ; Sawada, Renshi

Author_Institution

NTT Appl. Electron. Lab., Tokyo, Japan

Volume

9

Issue

5

fYear

1991

fDate

5/1/1991 12:00:00 AM

Firstpage

571

Lastpage

576

Abstract

A novel microlens that can be integrated on a laser-diode substrate by the planar process is proposed. It consists of two microcylindrical lenses fabricated by the planar process, and all of their dimensions are less than 100 μm. One lens is a horizontal focusing lens whose curved shape determines focusing. The other is a vertical focusing lens whose gradient refractive index determines focusing. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage

Keywords

gradient index optics; integrated optics; laser accessories; lenses; optical workshop techniques; semiconductor junction lasers; curved shape; fabrication errors; gradient refractive index; horizontal focusing lens; integration; laser-diode substrate; lens characteristics; microcylindrical lenses; microlens; planar process; vertical focusing lens; Apertures; Diode lasers; Laser beams; Lenses; Microoptics; Optical device fabrication; Optical devices; Optical sensors; Refractive index; Substrates;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.79532

Filename

79532