Title :
Integrated-optic heterodyne interferometer for displacement measurement
Author :
Toda, Hiroyuki ; Haruna, Masamitsu ; Nishihara, Hiroshi
Author_Institution :
Dept. of Electron. Eng., Osaka Univ., Japan
fDate :
5/1/1991 12:00:00 AM
Abstract :
An integrated-optic heterodyne interferometer is proposed for displacement measurement with an accuracy of several nanometers. All guided-wave components required for displacement measurement, including a serrodyne phase modulator, transverse-electric-transfer (TE-TM) mode converters, and a mode splitter, are integrated on a Z-propagating LiNbO 3 substrate of 47×5 min2. Using the fabricated optical IC, the phase difference between reference and signal beats has been steadily detected without stabilization against substrate temperature change. The phase difference between two beats was successfully measured, showing an accuracy of ±3 nm in the displacement measurement
Keywords :
displacement measurement; integrated optics; light interferometers; LiNbO3 substrate; accuracy; displacement measurement; fabricated optical IC; guided-wave components; integrated-optic heterodyne interferometer; mode splitter; phase difference; reference beats; serrodyne phase modulator; signal beats; substrate temperature change; transverse electric transverse mode converters; Displacement measurement; High speed optical techniques; Integrated optics; Optical interferometry; Optical mixing; Optical polarization; Optical sensors; Optical waveguides; Photonic integrated circuits; Temperature;
Journal_Title :
Lightwave Technology, Journal of
