Integrated-optic heterodyne interferometer for displacement measurement

Author

Toda, Hiroyuki ; Haruna, Masamitsu ; Nishihara, Hiroshi

Author_Institution

Dept. of Electron. Eng., Osaka Univ., Japan

Volume

9

Issue

5

fYear

1991

fDate

5/1/1991 12:00:00 AM

Firstpage

683

Lastpage

687

Abstract

An integrated-optic heterodyne interferometer is proposed for displacement measurement with an accuracy of several nanometers. All guided-wave components required for displacement measurement, including a serrodyne phase modulator, transverse-electric-transfer (TE-TM) mode converters, and a mode splitter, are integrated on a Z-propagating LiNbO ₃ substrate of 47×5 min². Using the fabricated optical IC, the phase difference between reference and signal beats has been steadily detected without stabilization against substrate temperature change. The phase difference between two beats was successfully measured, showing an accuracy of ±3 nm in the displacement measurement

Keywords

displacement measurement; integrated optics; light interferometers; LiNbO₃ substrate; accuracy; displacement measurement; fabricated optical IC; guided-wave components; integrated-optic heterodyne interferometer; mode splitter; phase difference; reference beats; serrodyne phase modulator; signal beats; substrate temperature change; transverse electric transverse mode converters; Displacement measurement; High speed optical techniques; Integrated optics; Optical interferometry; Optical mixing; Optical polarization; Optical sensors; Optical waveguides; Photonic integrated circuits; Temperature;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.79546

Filename

79546