Title :
Simulating the behavior of MEMS devices: computational methods and needs
Author :
Senturia, Stephen D. ; Azuru, N. ; White, Jacob
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
Technologies for fabricating a variety of MEMS devices have developed rapidly, but computational tools that allow engineers to quickly design and optimize these micromachines have not kept pace. Inadequate simulation tools force MEMS designers to resort to physical prototyping. To realistically simulate the behavior of complete micromachines, algorithmic innovation is necessary in several areas
Keywords :
circuit analysis computing; digital simulation; micromachining; micromechanical devices; semiconductor device manufacture; MEMS device behavior simulation; MEMS device fabrication; algorithmic innovation; computational methods; computational tools; physical prototyping; Atomic force microscopy; Chemical sensors; Computational modeling; Design engineering; Microelectromechanical devices; Micromachining; Micromechanical devices; Prototypes; Sensor systems; Wafer bonding;
Journal_Title :
Computational Science & Engineering, IEEE
