DocumentCode
1250572
Title
Simulating the behavior of MEMS devices: computational methods and needs
Author
Senturia, Stephen D. ; Azuru, N. ; White, Jacob
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Volume
4
Issue
1
fYear
1997
Firstpage
30
Lastpage
43
Abstract
Technologies for fabricating a variety of MEMS devices have developed rapidly, but computational tools that allow engineers to quickly design and optimize these micromachines have not kept pace. Inadequate simulation tools force MEMS designers to resort to physical prototyping. To realistically simulate the behavior of complete micromachines, algorithmic innovation is necessary in several areas
Keywords
circuit analysis computing; digital simulation; micromachining; micromechanical devices; semiconductor device manufacture; MEMS device behavior simulation; MEMS device fabrication; algorithmic innovation; computational methods; computational tools; physical prototyping; Atomic force microscopy; Chemical sensors; Computational modeling; Design engineering; Microelectromechanical devices; Micromachining; Micromechanical devices; Prototypes; Sensor systems; Wafer bonding;
fLanguage
English
Journal_Title
Computational Science & Engineering, IEEE
Publisher
ieee
ISSN
1070-9924
Type
jour
DOI
10.1109/99.590854
Filename
590854
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