• DocumentCode
    1250668
  • Title

    Surface flashover characteristics of diamond-like carbon thin films in vacuum

  • Author

    Kirkic, Hulya

  • Author_Institution
    Dept. of Electr. Eng., Auburn Univ., AL, USA
  • Volume
    4
  • Issue
    1
  • fYear
    1997
  • fDate
    2/1/1997 12:00:00 AM
  • Firstpage
    71
  • Lastpage
    78
  • Abstract
    Synthetic thin films such as diamond-like carbon (DLC) and polycrystalline diamond thin films can be used to increase surface flashover voltage of dielectric materials used in HV devices operating in vacuum. This work presents experimental results identifying some surface flashover characteristics of diamond-like carbon (DLC) thin films in space vacuum conditions. The DLC samples used in the experiments are produced by a microwave plasma deposition technique. The electrode material was copper, and a dc voltage was applied between the electrodes. Surface flashover voltage characteristics and the breakdown voltage wave forms of DLC thin film samples were determined. The results showed that DLC thin films may not be suitable materials for HV applications as dielectric materials in vacuum when coated onto semiconductor materials. Additionally, these results were compared with the surface flashover characteristics of polycrystalline diamond thin film and quartz samples
  • Keywords
    carbon; dielectric thin films; flashover; plasma deposited coatings; C; HV device; breakdown voltage; diamond-like carbon thin film; dielectric material; microwave plasma deposition; space vacuum; surface flashover; Diamond-like carbon; Dielectric materials; Dielectric thin films; Electrodes; Flashover; Semiconductor materials; Semiconductor thin films; Thin film devices; Transistors; Voltage;
  • fLanguage
    English
  • Journal_Title
    Dielectrics and Electrical Insulation, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9878
  • Type

    jour

  • DOI
    10.1109/94.590869
  • Filename
    590869