DocumentCode
1250668
Title
Surface flashover characteristics of diamond-like carbon thin films in vacuum
Author
Kirkic, Hulya
Author_Institution
Dept. of Electr. Eng., Auburn Univ., AL, USA
Volume
4
Issue
1
fYear
1997
fDate
2/1/1997 12:00:00 AM
Firstpage
71
Lastpage
78
Abstract
Synthetic thin films such as diamond-like carbon (DLC) and polycrystalline diamond thin films can be used to increase surface flashover voltage of dielectric materials used in HV devices operating in vacuum. This work presents experimental results identifying some surface flashover characteristics of diamond-like carbon (DLC) thin films in space vacuum conditions. The DLC samples used in the experiments are produced by a microwave plasma deposition technique. The electrode material was copper, and a dc voltage was applied between the electrodes. Surface flashover voltage characteristics and the breakdown voltage wave forms of DLC thin film samples were determined. The results showed that DLC thin films may not be suitable materials for HV applications as dielectric materials in vacuum when coated onto semiconductor materials. Additionally, these results were compared with the surface flashover characteristics of polycrystalline diamond thin film and quartz samples
Keywords
carbon; dielectric thin films; flashover; plasma deposited coatings; C; HV device; breakdown voltage; diamond-like carbon thin film; dielectric material; microwave plasma deposition; space vacuum; surface flashover; Diamond-like carbon; Dielectric materials; Dielectric thin films; Electrodes; Flashover; Semiconductor materials; Semiconductor thin films; Thin film devices; Transistors; Voltage;
fLanguage
English
Journal_Title
Dielectrics and Electrical Insulation, IEEE Transactions on
Publisher
ieee
ISSN
1070-9878
Type
jour
DOI
10.1109/94.590869
Filename
590869
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