Title :
Generation of Plasma Plume From Ge Target by Nanosecond Laser
Author :
Er, Ali Oguz ; Farha, Ashraf Hassan
Author_Institution :
Dept. of Phys., Old Dominion Univ., Norfolk, VA, USA
Abstract :
Properties of the plasma plume in pulsed-laser deposition affect the quality of the deposited film. We show images of laser-produced plasma upon the ablation of a germanium target by a nanosecond laser and compare the shapes of plume at different nitrogen background pressures. Understanding the mechanism of laser-produced plasma is critical to control the quality of the deposited film.
Keywords :
germanium; plasma materials processing; plasma production by laser; pulsed laser deposition; Ge; deposited film quality; germanium target ablation; laser produced plasma; nanosecond laser; nitrogen background pressure; plasma plume generation; plume shape; pulsed laser deposition; Gas lasers; Laser ablation; Plasmas; Pulsed laser deposition; Quantum dot lasers; Shape; Ablation; germanium; laser ablation; laser material processing applications; lasers; neodymium:YAG lasers; plasmas; pulsed lasers; quantum dots; semiconductor plasmas;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2158610
