Title :
Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source
Author :
Nowakowska, Helena ; Jasinski, Marek ; Mizeraczyk, Jerzy
Author_Institution :
Szewalski Inst. of Fluid-Flow Machinery, Gdańsk, Poland
Abstract :
Numerically obtained electric field module distributions inside a waveguide-based high-flow microwave plasma source (MPS) with a plasma column inside during a tuning procedure that employs a microwave plunger are presented. Standing-wave patterns have been obtained for each plunger position. The optimal position of the plunger has been found. Strong skin effect is seen in the plasma generated in the presented MPS.
Keywords :
high-frequency discharges; numerical analysis; plasma production; plasma sources; skin effect; microwave plunger; numerical analysis; obtained electric field module distributions; plasma column; plasma generation; skin effect; tuning procedure; waveguide-based microwave plasma source; Discharges; Electromagnetic waveguides; Electromagnetics; Electron tubes; Plasma sources; Tuning; Electromagnetic fields; microwave plasma; plasma sources; waveguides;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2158453
