DocumentCode
1251718
Title
Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source
Author
Nowakowska, Helena ; Jasinski, Marek ; Mizeraczyk, Jerzy
Author_Institution
Szewalski Inst. of Fluid-Flow Machinery, Gdańsk, Poland
Volume
39
Issue
11
fYear
2011
Firstpage
2906
Lastpage
2907
Abstract
Numerically obtained electric field module distributions inside a waveguide-based high-flow microwave plasma source (MPS) with a plasma column inside during a tuning procedure that employs a microwave plunger are presented. Standing-wave patterns have been obtained for each plunger position. The optimal position of the plunger has been found. Strong skin effect is seen in the plasma generated in the presented MPS.
Keywords
high-frequency discharges; numerical analysis; plasma production; plasma sources; skin effect; microwave plunger; numerical analysis; obtained electric field module distributions; plasma column; plasma generation; skin effect; tuning procedure; waveguide-based microwave plasma source; Discharges; Electromagnetic waveguides; Electromagnetics; Electron tubes; Plasma sources; Tuning; Electromagnetic fields; microwave plasma; plasma sources; waveguides;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2158453
Filename
5910402
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