DocumentCode
1252276
Title
Development of novel optoelectromechanical systems based on "transparent metals" PBG structures
Author
Baglio, Salvatore ; Bloemer, Mark ; Savalli, Nicolò ; Scalora, Mike
Author_Institution
Catania Univ., Italy
Volume
1
Issue
4
fYear
2001
fDate
12/1/2001 12:00:00 AM
Firstpage
288
Lastpage
295
Abstract
Developed a novel smart optoelectromechanical structure, fabricated using a multilayer, metal-dielectric photonic band gap (PBG) structure. We discuss innovative devices with electrically controllable optical properties that can be used as sensors with optical output signals for applications in harsh or hostile environments (pressure sensors, micro gravimeter, or micro accelerometer) or as optical modulators and optical limiters. Theoretical models of these novel devices together with experimental prototypes have been developed, and characterization of the devices has been performed. Moreover, microelectromechanical devices have been studied for application to this field and are presented. In particular, the problem of realizing highly sensitive accelerometers has been addressed, and it will be shown that the proposed approach allows detecting displacements of a few nanometers
Keywords
accelerometers; gravimeters; micro-optics; microsensors; optical modulation; photonic band gap; pressure sensors; MOEMS; accelerometers; electrically controllable optical properties; hostile environments; metal-dielectric photonic band gap structure; microaccelerometer; microelectromechanical devices; microgravimeter; microsensors; optical limiters; optical modulators; optical output signals; optoelectromechanical systems; pressure sensors; Accelerometers; Intelligent sensors; Nonhomogeneous media; Optical control; Optical devices; Optical modulation; Optical sensors; Photonic band gap; Pressure control; Sensor phenomena and characterization;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/7361.983468
Filename
983468
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