Complex electron wave reconstruction using parameter estimation

Author

vand den Bos, A.

Author_Institution

Dept. of Appl. Phys., Delft Univ. of Technol.

Volume

46

Issue

4

fYear

1997

fDate

8/1/1997 12:00:00 AM

Firstpage

826

Lastpage

830

Abstract

A new method is proposed for the reconstruction of the complex valued exit wave of a periodic specimen in a transmission electron microscope. The method uses a series of images recorded at different defoci. From these, inherently noisy, images the parameters defining the wave are estimated. The method keeps the number of parameters as small as possible. In addition, in simulations, it has been found to always produce the exit wave estimate fitting best to the images recorded

Keywords

Fourier series; digital simulation; image reconstruction; maximum likelihood estimation; physics computing; simulation; transmission electron microscopy; Fourier analysis; complex electron wave reconstruction; complex valued exit wave; identification; image reconstruction; maximum likelihood; modelling; parameter estimation; periodic specimen; simulation; transmission electron microscope; wave estimate; Cameras; Electron microscopy; Helium; Image reconstruction; Maximum likelihood estimation; Parameter estimation; Periodic structures; Pixel; Transfer functions; Transmission electron microscopy;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.650782

Filename

650782