Title :
Efficient focusing polymer waveguide grating couplers
Author :
Schnabel, B. ; Kley, Ernst-Bernhard ; Brauer, Alexej
fDate :
3/27/1997 12:00:00 AM
Abstract :
Investigations on focusing grating couplers fabricated in polymer waveguides by electron beam lithography are reported. With blazed gratings, an incoupling efficiency of 42% is achieved. A curvature correction of the grating lines allows the focusing properties to be improved: a spotsize which corresponds to one and a half times the diffraction limit is achieved
Keywords :
diffraction gratings; electron beam lithography; optical couplers; optical focusing; optical polymers; 42 percent; blazed gratings; curvature correction; diffraction limit; electron beam lithography; focusing grating couplers; focusing properties; grating lines; incoupling efficiency; polymer waveguides; spotsize;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970400
