• DocumentCode
    1253524
  • Title

    Helicons-the past decade

  • Author

    Chen, Francis F. ; Boswell, Rod W.

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • Volume
    25
  • Issue
    6
  • fYear
    1997
  • fDate
    12/1/1997 12:00:00 AM
  • Firstpage
    1245
  • Lastpage
    1257
  • Abstract
    First observed in gaseous plasmas in the early 1960s, helicon discharges lay like a sleeping giant until they emerged in the 1980s, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand
  • Keywords
    helicons; high-frequency discharges; history; plasma production; plasma waves; reviews; gaseous plasmas; helicon discharges; helicons; ionization efficiency; left-hand polarized mode; magnetized radio-frequency discharges; microelectronic circuits; plasma sources; right-hand polarized mode; semiconductor industry; Circuits; Electronics industry; Fault location; Ionization; Magnetic semiconductors; Microelectronics; Plasma applications; Plasma materials processing; Plasma sources; Radio frequency;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.650899
  • Filename
    650899