DocumentCode
1253524
Title
Helicons-the past decade
Author
Chen, Francis F. ; Boswell, Rod W.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
25
Issue
6
fYear
1997
fDate
12/1/1997 12:00:00 AM
Firstpage
1245
Lastpage
1257
Abstract
First observed in gaseous plasmas in the early 1960s, helicon discharges lay like a sleeping giant until they emerged in the 1980s, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand
Keywords
helicons; high-frequency discharges; history; plasma production; plasma waves; reviews; gaseous plasmas; helicon discharges; helicons; ionization efficiency; left-hand polarized mode; magnetized radio-frequency discharges; microelectronic circuits; plasma sources; right-hand polarized mode; semiconductor industry; Circuits; Electronics industry; Fault location; Ionization; Magnetic semiconductors; Microelectronics; Plasma applications; Plasma materials processing; Plasma sources; Radio frequency;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.650899
Filename
650899
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