DocumentCode :
1253708
Title :
MEMS
Author :
Sadiku, Matthew
Author_Institution :
Boeing Satellite Syst., Los Angeles, CA, USA
Volume :
21
Issue :
1
fYear :
2002
Firstpage :
4
Lastpage :
5
Abstract :
MEMS (Micro-Electro-Mechanical Systems) technology has already taken root firmly in today´s world. It is destined to become a hallmark 21st century manufacturing technology with numerous and diverse applications. MEMS will have a dramatic impact or everything from aerospace technology to biotechnology. As a breakthrough technology allowing unparalleled synergy between apparently unrelated fields of endeavour such as biology and microelectronics, MEMS is forecasted to have a commercial and defense market growth similar to its parent IC technology. The author presents a brief overview of this breakthrough technology, looking at the design, fabrication process, packaging, testing and applications
Keywords :
micromachining; micromechanical devices; packaging; MEMS applications; MEMS technology; fabrication process; manufacturing technology; micro-electro-mechanical systems; micromachining processes; packaging; testing;
fLanguage :
English
Journal_Title :
Potentials, IEEE
Publisher :
ieee
ISSN :
0278-6648
Type :
jour
DOI :
10.1109/45.985317
Filename :
985317
Link To Document :
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