Design optimization of beam-like ferroelectrics-silicon microphone and microspeaker

Author

Tian-Ling, Ren ; Lin-Tao, Zhang ; Li-Tian, Liu ; Zhi-Jian, Li

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

49

Issue

2

fYear

2002

Firstpage

266

Lastpage

270

Abstract

Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. This integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices.

Keywords

lead compounds; loudspeakers; microphones; piezoelectric transducers; platinum; silicon compounds; Pt-PZT-Pt-SiO/sub 2/-Si/sub 3/N/sub 4/; Pt-PbZrO3TiO3-Pt-SiO2-Si3N4; Pt/Pb(Zr,Ti)O/sub 3//Pt/Si0/sub 2//Si/sub 3/N/sub 4/; beam-like ferroelectrics-silicon microphone; cantilever structure; design optimization; integrated microphone/microspeaker; micro-acoustic devices; multimorph model; sensitivity; sound pressure level; Air gaps; Design optimization; Electrodes; Fabrication; Ferroelectric materials; Microphones; Piezoelectric materials; Piezoelectric transducers; Silicon; Zinc oxide; Acoustics; Deafness; Hearing Aids; Humans; Miniaturization; Prosthesis Design; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.985710

Filename

985710