Title :
Design optimization of beam-like ferroelectrics-silicon microphone and microspeaker
Author :
Tian-Ling, Ren ; Lin-Tao, Zhang ; Li-Tian, Liu ; Zhi-Jian, Li
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. This integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices.
Keywords :
lead compounds; loudspeakers; microphones; piezoelectric transducers; platinum; silicon compounds; Pt-PZT-Pt-SiO/sub 2/-Si/sub 3/N/sub 4/; Pt-PbZrO3TiO3-Pt-SiO2-Si3N4; Pt/Pb(Zr,Ti)O/sub 3//Pt/Si0/sub 2//Si/sub 3/N/sub 4/; beam-like ferroelectrics-silicon microphone; cantilever structure; design optimization; integrated microphone/microspeaker; micro-acoustic devices; multimorph model; sensitivity; sound pressure level; Air gaps; Design optimization; Electrodes; Fabrication; Ferroelectric materials; Microphones; Piezoelectric materials; Piezoelectric transducers; Silicon; Zinc oxide; Acoustics; Deafness; Hearing Aids; Humans; Miniaturization; Prosthesis Design; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
