DocumentCode
1255001
Title
Improved quality factor spiral inductors on GaAs substrates
Author
Bahl, Inder J.
Author_Institution
ITT GaAsTEK, Roanoke, VA, USA
Volume
9
Issue
10
fYear
1999
fDate
10/1/1999 12:00:00 AM
Firstpage
398
Lastpage
400
Abstract
We present test data for several spiral inductors with improved quality factors fabricated on GaAs substrates. It has been shown experimentally that the quality factor of spiral inductors can be increased by reducing magnetically induced currents and by narrowing the line width of the inner turns similar to the one reported for silicon micromachined inductor. Using this technique, we observed about 22% improvement in the quality factor of spiral inductors as compared to standard spiral inductors having constant line width
Keywords
MMIC; Q-factor; equivalent circuits; gallium arsenide; inductors; substrates; GaAs; GaAs substrates; Q-factor improvement; inner turns linewidth; line width narrowing; magnetically induced currents reduction; quality factor; spiral inductors; Conductors; Dielectric losses; Dielectric substrates; Eddy currents; Frequency; Gallium arsenide; Inductors; Nonhomogeneous media; Q factor; Spirals;
fLanguage
English
Journal_Title
Microwave and Guided Wave Letters, IEEE
Publisher
ieee
ISSN
1051-8207
Type
jour
DOI
10.1109/75.798028
Filename
798028
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