Title :
Prepatterned optical circuits in thin ion-sliced single-crystal films of LiNbO3
Author :
Radojevic, A.M. ; Osgood, R.M., Jr. ; Roy, N.A. ; Bakhru, H.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
fDate :
3/1/2002 12:00:00 AM
Abstract :
Crystal ion slicing was used in conjunction with conventional annealed proton exchange in Z-cut LiNbO/sub 3/ to result in prepatterned microns-thick single-crystal LiNbO/sub 3/ films with channel guides and a measured waveguide propagation loss of 0.2-0.7 dB/cm. Full optical circuit transfer, including a buffer layer and a patterned metal electrode structure for active control was demonstrated.
Keywords :
etching; integrated optics; ion implantation; lithium compounds; optical fabrication; optical films; optical losses; rapid thermal annealing; 0.2 to 0.7 dB; LiNbO/sub 3/; Z-cut LiNbO/sub 3/; active control; buffer layer; channel guides; conventional annealed proton exchange; crystal ion slicing; full optical circuit transfer; highly energetic ion implantation; patterned metal electrode structure; prepatterned microns-thick single-crystal LiNbO/sub 3/ films; prepatterned optical circuits; rapid thermal annealing; thin ion-sliced single-crystal films; waveguide propagation loss; wet chemical etching; Annealing; Buffer layers; Circuits; Loss measurement; Optical buffering; Optical films; Optical waveguides; Particle beam optics; Propagation losses; Protons;
Journal_Title :
Photonics Technology Letters, IEEE
