Title :
Directly UV written silica-on-silicon planar waveguides with low loss
Author :
Svalgaard, M. ; Kristensen, M.
Author_Institution :
Microelectron. Center, Tech. Univ. Denmark, Lyngby
fDate :
5/8/1997 12:00:00 AM
Abstract :
Planar waveguides have been fabricated in silica-on-silicon using a continuous wave UV laser beam. A propagation loss of <0.2 dB/cm and low bending loss are demonstrated. The authors´ results show that the UV writing method permits high volume production of low loss waveguide components
Keywords :
elemental semiconductors; laser beam applications; optical fabrication; optical losses; optical planar waveguides; optical waveguide components; silicon; silicon compounds; SiO2-Si; bending loss; continuous wave UV laser beam; direct UV writing; high volume production; optical losses; optical planar waveguides; propagation loss; waveguide components;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970602
