• DocumentCode
    1255368
  • Title

    Directly UV written silica-on-silicon planar waveguides with low loss

  • Author

    Svalgaard, M. ; Kristensen, M.

  • Author_Institution
    Microelectron. Center, Tech. Univ. Denmark, Lyngby
  • Volume
    33
  • Issue
    10
  • fYear
    1997
  • fDate
    5/8/1997 12:00:00 AM
  • Firstpage
    861
  • Lastpage
    863
  • Abstract
    Planar waveguides have been fabricated in silica-on-silicon using a continuous wave UV laser beam. A propagation loss of <0.2 dB/cm and low bending loss are demonstrated. The authors´ results show that the UV writing method permits high volume production of low loss waveguide components
  • Keywords
    elemental semiconductors; laser beam applications; optical fabrication; optical losses; optical planar waveguides; optical waveguide components; silicon; silicon compounds; SiO2-Si; bending loss; continuous wave UV laser beam; direct UV writing; high volume production; optical losses; optical planar waveguides; propagation loss; waveguide components;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970602
  • Filename
    592613
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1255368