Title :
Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing
Author :
Hasper, Albert ; Oosterlaken, Ed ; Huussen, Frank ; Claasen-Vujcic, Tanja
Author_Institution :
ASM Eur., Bilthoven, Netherlands
Abstract :
Production of 300-mm diameter wafers will begin in the next few years. To keep costs low and throughput high, manufacturers must design new equipment such as the furnace system presented here, rather than simply upscaling existing 200-mm equipment
Keywords :
furnaces; integrated circuit manufacture; wafer-scale integration; 300-mm diameter wafers; 300-mm wafer processing; vertical batch furnace; Boats; Costs; Europe; Furnaces; Hardware; Inductors; Manufacturing processes; Production equipment; Robots; Throughput;
Journal_Title :
Micro, IEEE
