Title :
Impact of MOSFET gate oxide breakdown on digital circuit operation and reliability
Author :
Kaczer, Ben ; Degraeve, Robin ; Rasras, Mahmoud ; Van De Mieroop, Koen ; Roussel, Philippe J. ; Groeseneken, Guido
Author_Institution :
IMEC, Leuven, Belgium
fDate :
3/1/2002 12:00:00 AM
Abstract :
The influence of FET gate oxide breakdown on the performance of a ring oscillator circuit is studied using statistical tools, emission microscopy, and circuit analysis. It is demonstrated that many hard breakdowns can occur in this circuit without affecting its overall function. Time-to-breakdown data measured on individual FETs are shown to scale correctly to circuit level. SPICE simulations of the ring oscillator with the affected FET represented by an equivalent circuit confirm the measured influence of the breakdown on the circuit´s frequency, the stand-by and the operating currents. It is concluded that if maintaining a digital circuit´s logical functionality is the sufficient reliability criterion, a nonzero probability exists that the circuit will remain functional beyond the first gate oxide breakdown. Consequently, relaxation of the present reliability criterion in certain cases might be possible
Keywords :
CMOS logic circuits; MOSFET; SPICE; VLSI; integrated circuit reliability; semiconductor device breakdown; CMOS digital integrated circuits; CMOSFET oscillators; MOSFET gate oxide breakdown; SPICE simulations; circuit reliability; dielectric breakdown; digital circuit operation; dynamic characteristics; emission microscopy; equivalent circuit; hard gate-oxide breakdown; nonzero probability; ring oscillator circuit; static characteristics; time-to-breakdown data; Circuit analysis; Circuit simulation; Digital circuits; Electric breakdown; Equivalent circuits; FETs; MOSFET circuits; Microscopy; Ring oscillators; SPICE;
Journal_Title :
Electron Devices, IEEE Transactions on