A MEMS Self-Powered Sensor and RF Transmission Platform for WSN Nodes

We report a new microelectromechanical systems (MEMS) self-powered sensor and RF transmission platform for wireless sensor network (WSN) nodes which can operate at energy levels orders of magnitude lower than current equivalent systems. Using the microgenerator as a power amplifier to drive a passive kick-and-resonate transmitter architecture as an alternative to a standard power hungry transmitter, this platform eliminates the need for both secondary energy storage and power conditioning circuits. This enables a significant reduction in the size, weight, complexity and cost, and allows operation at much lower excitation frequencies. The prototype platform consists of a MEMS rolling-rod microgenerator, the output voltage of which is used to kick a resonant loop antenna. The generator can be directly primed by a suitable voltage-output sensor. This is the first platform to achieve wireless sensor transmission powered only by a MEMS energy harvester.