Title :
Introduction to the Special Issue on the 2009 International Reliability Physics Symposium
Author :
Stathis, J. H. ; Suehle, John H. ; Lacoe, Ronald C. ; Moore, Thomas M.
Abstract :
The three articles in this special section were presented at the 2009 International Reliability Physics Symposium.
Keywords :
Dielectric devices; Integrated circuit interconnections; Integrated circuit reliability; Mechanical factors; Microelectronics; Nanoporous materials; Physics; Semiconductor device reliability; Special issues and sections; Thin film transistors;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2009.2033405