Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (V_s)_min in an ideal infinite parallel plates at high frequency is first discussed as a function of both pd and fd (f the applied frequency, d the electrode distance, and p the gas pressure). As decreasing d,(V_s)_min increases at fixed f, while (V_s)_min decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capability for maintaining a micro-cell plasma is investigated under fd<υ(d_e)/π for different two-dimensional geometry of the micro cell (υ(d_e) is the effective drift velocity of electrons). The influence of the secondary electron from the electrode becomes important for the maintenance of a microcell plasma and emission efficiency. A powered ring electrode and ground plate system realizes the micro-cell plasma with high density at 13.56 MHz