Title :
Magnetic properties and corrosion resistance of single-crystal iron films prepared by dual-ion-beam sputtering
Author :
Nishimura, Kaznhiro ; Horii, Kazuyoshi ; Fujii, Toshitaka ; Inoue, Mitsuteru
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
fDate :
9/1/1999 12:00:00 AM
Abstract :
Single-crystal iron films with the (100), (110) and (111) planes were epitaxially grown on single-crystal GaAs plates with the respective crystallographic planes prepared by dual-ion-beam sputtering. Iron targets with different purity with 99.99%, 99.5% and 98% were used. Crystallinity of the films examined by X-ray diffraction was not so sensitive to the target purity, but magnetic properties and corrosion resistance were strongly influenced by the target purity; soft magnetic and high corrosion resistant films were obtained by high purity iron target. The most corrosion resistant films were obtained for (110) iron films using 99.99% iron target, which is comparable to high corrosion-resistant stainless steel
Keywords :
corrosion resistance; crystal structure; ferromagnetic materials; iron; magnetic epitaxial layers; soft magnetic materials; sputter deposition; vapour phase epitaxial growth; Fe; GaAs; X-ray diffraction; corrosion resistance; crystallinity; crystallographic planes; dual-ion-beam sputtering; epitaxially grown films; magnetic properties; single-crystal GaAs plates; single-crystal iron films; soft magnetic films; Corrosion; Crystallization; Crystallography; Gallium arsenide; Iron; Magnetic films; Magnetic properties; Soft magnetic materials; Sputtering; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
