Title :
New micromachined inductors on silicon substrates
Author :
Park, Jae Y. ; Allen, Mark G.
Author_Institution :
Microsyst. Lab., LG Corp. Inst. of Technol., Seoul, South Korea
fDate :
9/1/1999 12:00:00 AM
Abstract :
Microinductors with two layer vertically stacked spiral-type copper conductor lines and permalloy core have been fabricated, characterized, and compared using micromachining techniques. In this research, micromachined inductors with vertically laminated magnetic alloy cores are found to have better high frequency characteristics such as high inductance, high quality factor, and low AC resistance resulting in low magnetic core losses at high frequencies, than non-laminated types
Keywords :
Permalloy; Q-factor; coils; copper; inductors; laminations; losses; magnetic cores; micromachining; silicon; Cu conductor lines; Cu-Si; Si; Si substrates; high frequency characteristics; high inductance; high quality factor; low AC resistance; low magnetic core losses; microinductors; micromachined inductors; permalloy core; spiral-type; two layer vertically stacked lines; vertically laminated magnetic alloy cores; Conductors; Copper; Frequency; Inductance; Inductors; Magnetic cores; Magnetic losses; Micromachining; Q factor; Silicon;
Journal_Title :
Magnetics, IEEE Transactions on
