• DocumentCode
    1259667
  • Title

    FEM analysis of thin-film inductors used in GHz frequency bands

  • Author

    Tanabe, Shigeo ; Shiraki, Yasuhiro ; Itoh, Keuji ; Yamaguchi, Masahiro ; Arai, Keu-ichi

  • Author_Institution
    Mitsubishi Electr. Corp., Hyogo, Japan
  • Volume
    35
  • Issue
    5
  • fYear
    1999
  • fDate
    9/1/1999 12:00:00 AM
  • Firstpage
    3580
  • Lastpage
    3582
  • Abstract
    Three dimensional finite element method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors. A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results
  • Keywords
    Maxwell equations; finite element analysis; impedance matching; inductors; magnetic flux; magnetic microwave devices; magnetic thin film devices; soft magnetic materials; 3D-FEM simulations; Maxwell equations; flat magnetic film; granular type soft magnetic films; impedance matching; inductance increase; magnetic film utilization; magnetic flux; microwave frequency band inductors; spiral coil; thin-film inductors; vector potential; Amorphous magnetic materials; Coils; Frequency; MMICs; Magnetic anisotropy; Magnetic films; Permeability; Soft magnetic materials; Spirals; Thin film inductors;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.800596
  • Filename
    800596