Title :
Sensitive stress sensor using amorphous magnetostrictive wires on both ends fixed double beam and diaphragm
Author :
Shen, L.P. ; Naruse, Y. ; Kusumoto, D. ; Kita, Eiji ; Mohri, K. ; Uchiyama, T. ; Yoshinaga, T.
Author_Institution :
Dept. of Electr. Eng., Nagoya Univ., Japan
fDate :
9/1/1999 12:00:00 AM
Abstract :
New sensitive stress sensors having a both ends fixed double beam and a diaphragm on which a pair of 20 μm diameter CoSiB amorphous wires are adhered as the stress-impedance (SI) element connecting with a CMOS IC multivibrator circuit. The SI characteristics are quantitatively analyzed using a magnetization rotation model and measured BH hysteresis loops. Detection of a blood vessel pulsation is also carried out
Keywords :
amorphous magnetic materials; boron alloys; cobalt alloys; ferromagnetic materials; magnetic hysteresis; magnetic sensors; magnetisation reversal; magnetostrictive devices; silicon alloys; stress measurement; 20 micron; BH hysteresis loops; CMOS IC multivibrator circuit; CoSiB; amorphous magnetostrictive wires; blood vessel pulsation; both ends fixed double beam; diaphragm; magnetization rotation model; stress sensor; stress-impedance element; Amorphous magnetic materials; Amorphous materials; CMOS integrated circuits; Joining processes; Magnetic analysis; Magnetic sensors; Magnetostriction; Sensor phenomena and characterization; Stress; Wires;
Journal_Title :
Magnetics, IEEE Transactions on
