A CPW T-resonator technique for electrical characterization of microwave substrates

Author

Peterson, Rebecca Lorenz ; Drayton, Rhonda Franklin

Author_Institution

Electr. & Comput. Eng. Dept., Minnesota Univ., Minneapolis, MN, USA

Volume

12

Issue

3

fYear

2002

fDate

3/1/2002 12:00:00 AM

Firstpage

90

Lastpage

92

Abstract

An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.

Keywords

coplanar waveguide components; microwave materials; microwave measurement; permittivity measurement; resonators; substrates; 30 GHz; Si; attenuation; calibration independence; dielectric constant; electrical characterization; finite ground coplanar waveguide T-resonator; impedance independence; microwave substrate; Calibration; Coplanar waveguides; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Microstrip; Microwave theory and techniques; Resonance; Silicon;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/7260.989861

Filename

989861