DocumentCode
1260464
Title
Microwave solid-state active devices
Author
Haddad, George I. ; Trew, Robert J.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume
50
Issue
3
fYear
2002
fDate
3/1/2002 12:00:00 AM
Firstpage
760
Lastpage
779
Abstract
Solid-state devices have had a major impact on the development of microwave and millimeter-wave systems. Starting with development work dating back to the 1940s, a variety of two- and three-terminal device structures have been proposed, fabricated, and found their way into commercial and military applications. These devices have resulted in the realization of numerous systems that would not otherwise be possible. The device development effort has been closely linked to advances in semiconductor materials growth and processing technology. Many of the advanced device concepts can only be implemented with the advent of advanced materials growth technology, such as molecular-beam epitaxy, and fine-line lithography techniques, such as electron-beam lithography. Advanced materials technology has also provided the ability to fabricate heterostructures that permit the advantages of multiple material layers to be optimized for device applications. High-performance diodes and transistors are now available for use from UHF into the millimeter-wave spectrum, approaching terahertz frequencies. The development, operating principles, and state-of-the-art of various diode and transistor structures are reviewed
Keywords
UHF diodes; UHF transistors; electron beam lithography; microwave diodes; microwave transistors; millimetre wave diodes; millimetre wave transistors; molecular beam epitaxial growth; semiconductor growth; UHF solid-state devices; commercial applications; device applications; device development; diode structures; diodes; electron-beam lithography; fine-line lithography techniques; heterostructures; materials growth technology; materials technology; microwave solid-state active devices; microwave systems; military applications; millimeter-wave solid-state devices; millimeter-wave systems; molecular-beam epitaxy; multiple material layers; semiconductor materials growth technology; semiconductor processing technology; three-terminal device structures; transistor structures; transistors; two-terminal device structures; Frequency; Lithography; Materials science and technology; Microwave devices; Millimeter wave technology; Millimeter wave transistors; Molecular beam epitaxial growth; Semiconductor diodes; Semiconductor materials; Solid state circuits;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/22.989960
Filename
989960
Link To Document