Title :
A Plasma Lens for Magnetron Sputtering
Author :
Anders, André ; Brown, Jeff
Author_Institution :
Lawrence Berkeley Nat. Lab., Univ. of California, Berkeley, CA, USA
Abstract :
A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
Keywords :
electrodes; ionisation; lenses; plasma devices; plasma diagnostics; plasma materials processing; plasma transport processes; solenoids; sputtering; excitation; ionization; magnetron sputtering; photography; plasma lens; plasma transport; potential-defining ring electrodes; Ions; Lenses; Magnetic resonance imaging; Plasmas; Solenoids; Sputtering; Substrates; Plasma devices; plasma materials processing; plasma transport processes; sputtering; thin films;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2157172
