DocumentCode
1261322
Title
Novel measurements of flying height and attitudes using Michelson laser interferometry
Author
Mitsuya, Yasunaga ; Chihara, Kenji ; Yoshioka, Mikihito
Author_Institution
Nagoya Univ., Japan
Volume
35
Issue
5
fYear
1999
fDate
9/1/1999 12:00:00 AM
Firstpage
2338
Lastpage
2340
Abstract
Applications of the Michelson laser interferometry to the measurement of head-disk spacing were presented. This method utilized the phase comparison of two kinds of fringe patterns formed over slider and disk surfaces simultaneously based on the Michelson interferometry. One of the applications was a measurement of spacing variations of heads while sliding in contact with actual disks. As an extended application, a flying height measurement through glass disks was demonstrated
Keywords
light interferometry; magnetic heads; measurement by laser beam; Michelson laser interferometry; flying height; fringe patterns; glass disks; head-disk spacing; phase comparison; Calibration; Disk drives; Glass; Interference; Laser beams; Magnetic heads; Mirrors; Optical interferometry; Position sensitive particle detectors; Surface emitting lasers;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.800819
Filename
800819
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