DocumentCode
1261792
Title
Recording heads with track widths suitable for 100 Gbit/in2 density
Author
Khizroev, S.K. ; Kryder, M.H. ; Ikeda, Y. ; Rubin, K. ; Arnett, P. ; Best, M. ; Thompson, D.A.
Author_Institution
Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA
Volume
35
Issue
5
fYear
1999
fDate
9/1/1999 12:00:00 AM
Firstpage
2544
Lastpage
2546
Abstract
Focused ion beam etching has been used to trim both longitudinal and perpendicular recording heads with track widths as narrow as 60 nm. 3D boundary element modeling has been used to optimize trimming parameters. Tracks written with the trimmed heads using spin-stands and imaged using magnetic force microscopy were as narrow as 100 nm
Keywords
boundary-elements methods; focused ion beam technology; magnetic force microscopy; magnetic heads; perpendicular magnetic recording; sputter etching; 100 nm; 3D boundary element modeling; 60 nm; focused ion beam etching; longitudinal recording heads; magnetic force microscopy; narrow track widths; optimized trimming parameters; perpendicular recording heads; soft underlayer; spin-stands; Etching; Focusing; Ion beams; Magnetic flux; Magnetic force microscopy; Magnetic heads; Magnetic materials; Magnetic recording; Perpendicular magnetic recording; Saturation magnetization;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.800885
Filename
800885
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