DocumentCode
1262851
Title
Residual stress of chromium, magnetic, and carbon films
Author
Peng, Grant ; Wu, Fang ; Lin, Judy
Author_Institution
Komag Inc., San Jose, CA, USA
Volume
35
Issue
5
fYear
1999
fDate
9/1/1999 12:00:00 AM
Firstpage
3004
Lastpage
3006
Abstract
Residual mechanical stresses are measured for ultra thin films, Cr, Co-alloy and carbon and their combinations by means of an optical interferometer. The individual stress is additive. The dependence of the carbon, Cr, and Co-alloy film stresses on film thickness indicates that the residual stress originates from film deposition processes as an interfacial phenomenon. The dependence of stress on the chemical properties of the carbon film is also studied in this paper
Keywords
carbon; chromium; internal stresses; light interferometry; magnetic thin films; C; Co alloy film; Cr; carbon film; chromium film; magnetic film; optical interferometry; residual mechanical stress; ultrathin film; Amorphous magnetic materials; Chromium; Diamond-like carbon; Magnetic films; Mechanical variables measurement; Optical films; Optical interferometry; Residual stresses; Stress measurement; Substrates;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.801066
Filename
801066
Link To Document