Deposition of c-axis oriented BaM ferrite layers with low surface roughness on textured underlayers

Author

Naoe, Masahiko ; Matsushita, Nobuhiro ; Watanabe, Kou ; Ichinose, Makoto ; Nakagawa, Shigeki

Author_Institution

Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan

Volume

35

Issue

5

fYear

1999

Firstpage

3016

Lastpage

3018

Abstract

Ba ferrite layers were deposited on ZnO(001), Au(111), Pt(111), and Pt(100) underlayers using facing target sputtering, and the surface smoothnesses, crystal orientations, and magnetic characteristics were compared. The center-line average roughness R, was smallest at 1.7 nm for a Ba ferrite layer deposited on a Pt(111) underlayer. Ba ferrite layers deposited on underlayers other than Pt(100) exhibited preferential c-axis orientation and their magnetization was mainly oriented perpendicular to the film plane. The smoothest surface, coercivity, as well as high perpendicular and low in-plane coercivity was attained for a Ba ferrite layer deposited on a Pt(111) underlayer.

Keywords

barium compounds; coercive force; ferrites; magnetic thin films; magnetisation; sputtered coatings; surface topography; Au; BaFe/sub 12/O/sub 19/; BaM ferrite film; Pt; ZnO; coercivity; crystal orientation; facing target sputter deposition; magnetic properties; magnetization; surface roughness; textured underlayer; Crystallization; Ferrite films; Magnesium compounds; Magnetic films; Perpendicular magnetic recording; Rough surfaces; Sputtering; Substrates; Surface roughness; Surface texture;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.801070

Filename

801070