Quasi-microwave-range inductors covered with Co-based magnetic thin films

Author

Saito, T. ; Tsutsui, K. ; Yahagi, S. ; Matsukura, Y. ; Endoh, H. ; Eshita, T. ; Hikosaka, K.

Author_Institution

Daido Steel Ltd., Nagoya, Japan

Volume

35

Issue

5

fYear

1999

fDate

9/1/1999 12:00:00 AM

Firstpage

3187

Lastpage

3189

Abstract

Quasi-micro-wave-range inductors have been studied, in which conductors are covered with Co-based magnetic thin films, such as Co-Pd-Si-O granular film and Co-Nb-Zr amorphous film. For the inductor with Co-Pd-Si-O film, the inductance at GHz range was expected to be higher than that of inductor with Co-Nb-Zr film. It is supposed that large magnetization exceeds 10 kG and large anisotropy exceeds 100 Oe of Co-Pd-Si-O film and causes high resonance frequency

Keywords

amorphous magnetic materials; cobalt alloys; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic microwave devices; magnetic thin film devices; niobium alloys; palladium alloys; silicon alloys; zirconium alloys; CoNbZr; CoPdSiO; amorphous film; anisotropy; granular film; magnetic thin films; magnetization; quasi-microwave-range inductors; resonance frequency; Amorphous magnetic materials; Amorphous materials; Anisotropic conductive films; Conductive films; Inductance; Magnetic anisotropy; Magnetic films; Magnetization; Perpendicular magnetic anisotropy; Thin film inductors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.801123

Filename

801123