Title :
Quasi-microwave-range inductors covered with Co-based magnetic thin films
Author :
Saito, T. ; Tsutsui, K. ; Yahagi, S. ; Matsukura, Y. ; Endoh, H. ; Eshita, T. ; Hikosaka, K.
Author_Institution :
Daido Steel Ltd., Nagoya, Japan
fDate :
9/1/1999 12:00:00 AM
Abstract :
Quasi-micro-wave-range inductors have been studied, in which conductors are covered with Co-based magnetic thin films, such as Co-Pd-Si-O granular film and Co-Nb-Zr amorphous film. For the inductor with Co-Pd-Si-O film, the inductance at GHz range was expected to be higher than that of inductor with Co-Nb-Zr film. It is supposed that large magnetization exceeds 10 kG and large anisotropy exceeds 100 Oe of Co-Pd-Si-O film and causes high resonance frequency
Keywords :
amorphous magnetic materials; cobalt alloys; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic microwave devices; magnetic thin film devices; niobium alloys; palladium alloys; silicon alloys; zirconium alloys; CoNbZr; CoPdSiO; amorphous film; anisotropy; granular film; magnetic thin films; magnetization; quasi-microwave-range inductors; resonance frequency; Amorphous magnetic materials; Amorphous materials; Anisotropic conductive films; Conductive films; Inductance; Magnetic anisotropy; Magnetic films; Magnetization; Perpendicular magnetic anisotropy; Thin film inductors;
Journal_Title :
Magnetics, IEEE Transactions on
