Title :
Introduction to the issue on optical MEMS
Author :
Solgaard, Olav ; Ford, Joseph E. ; Fujita, Hideaki ; Herzig, H.P.
Author_Institution :
Stanford University, Edward L. Ginzton Laboratory
Keywords :
Biomedical optical imaging; Commercialization; Communication switching; Investments; Micromechanical devices; Optical fiber communication; Optical sensors; Optical switches; Sensor arrays; Telecommunication switching;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2002.991392
