Standing-wave Fourier transform spectrometer based on integrated MEMS mirror and thin-film photodetector

Author

Kung, Helen L. ; Bhalotra, Sameer R. ; Mansell, Justin D. ; Miller, David A B ; Harris, James S., Jr.

Author_Institution

Dept. of Electr. Eng. & Appl. Phys., Stanford Univ., CA, USA

Volume

8

Issue

1

fYear

2002

Firstpage

98

Lastpage

105

Abstract

We report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 μm, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm

Keywords

Fourier transform spectrometers; electrostatic devices; micro-optics; micromechanical devices; mirrors; photodetectors; stability; 633 nm; 65 micron; electrical back plane; electrostatically actuated microelectromechanical mirror; fixed relative alignment; integrated MEMS mirror; integrated device; linear architecture; miniature Fourier transform spectrometer; mirror stability; on-resonance displacement; resolution; spectrometer; standing wave; standing-wave transform spectrometer; thin-film photodetector; Biomedical signal processing; Fourier transforms; Interferometers; Micromechanical devices; Mirrors; Photodetectors; Sampling methods; Spectroscopy; Transistors; Wavelength measurement;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/2944.991404

Filename

991404