Title :
Modeling of MOEMS components using HDL-A
Author :
Saadany, Bassam ; Khalil, Diaa A.
Author_Institution :
MEMSCAP Opt. Commun. Group, Cairo, Egypt
Abstract :
A method for modeling the optomechanical coupling in MOEMS components is presented. For this purpose, the beam propagation method has been implemented using a hardware discription language. This enables the simulation of optical wave propagation on the system level, along with existing mechanical models in the same environment. Both free space and guided wave microopto-electromechanical systems components are simulated using this technique and satisfactory results are obtained
Keywords :
micro-optics; micromechanical devices; optical design techniques; optical switches; HDL-A; MOEMS components modelling; beam propagation method; free space systems; guided wave systems; hardware description language; mechanical models; micro optoelectromechanical systems components; optical wave propagation; optomechanical coupling; simulation; system level; Circuit simulation; Hardware design languages; Micromechanical devices; Optical beams; Optical fiber communication; Optical filters; Optical propagation; Optical refraction; Optical sensors; Optical variables control;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.991408
