Title :
Microdischarge arrays: a new family of photonic devices
Author :
Sung-Jin Park ; Chen, J. ; Wagner, C.J. ; Ostrom, N.P. ; Chang Liu ; Eden, J. Gary
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 /spl mu/m)/sup 2/ in emitting area (nanoliters in volume) and arrays as large as 30 /spl times/ 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.
Keywords :
arcs (electric); cathodes; glow discharges; micro-optics; silicon; Si; Si pyramidal cathode devices; arc discharge; electrical characteristics; emitting area; gas pressures; metal/polymer structures; microdischarge arrays; microfluidic systems; micromechanical systems; microoptical sources; microoptoelectronic systems; nanoliters; optical characteristics; photon production; photonic devices; semiconductors; silicon-based microdischarge devices; Atmosphere; Electric variables; Fluidic microsystems; Microfluidics; Nanoscale devices; Optical arrays; Optical devices; Optical polymers; Stimulated emission; Vacuum systems;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.991409
