Microdischarge arrays: a new family of photonic devices

Author

Sung-Jin Park ; Chen, J. ; Wagner, C.J. ; Ostrom, N.P. ; Chang Liu ; Eden, J. Gary

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

8

Issue

1

fYear

2002

Firstpage

139

Lastpage

147

Abstract

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 /spl mu/m)/sup 2/ in emitting area (nanoliters in volume) and arrays as large as 30 /spl times/ 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

Keywords

arcs (electric); cathodes; glow discharges; micro-optics; silicon; Si; Si pyramidal cathode devices; arc discharge; electrical characteristics; emitting area; gas pressures; metal/polymer structures; microdischarge arrays; microfluidic systems; micromechanical systems; microoptical sources; microoptoelectronic systems; nanoliters; optical characteristics; photon production; photonic devices; semiconductors; silicon-based microdischarge devices; Atmosphere; Electric variables; Fluidic microsystems; Microfluidics; Nanoscale devices; Optical arrays; Optical devices; Optical polymers; Stimulated emission; Vacuum systems;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/2944.991409

Filename

991409