Title :
Optical MEMS devices based on moving waveguides
Author_Institution :
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Abstract :
The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and optical scanner
Keywords :
electro-optical deflectors; micro-optics; micromechanical devices; optical planar waveguides; optical scanners; optical sensors; optical switches; vibration measurement; integrated optics; moving waveguides; optical MEMS devices; optical microelectromechanical systems; optical scanner; optical switch; optical waveguides; overview; silica on silicon technology; technological problems; vibration sensor; Biomedical optical imaging; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical crosstalk; Optical devices; Optical filters; Optical interferometry; Optical sensors; Optical waveguides;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.991411
